AVS Short Course Catalog
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AVS is a nonprofit organization that promotes communication, education, networking, recommended practices, research, and the dissemination of knowledge on an international scale, in the application of vacuum and other controlled environments to understand and develop interfaces, new materials, processes, and devices through the interaction of science and technology.
 
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**Each listed Instructor and Course is an active link that opens to their respective descriptions.
 
Instructor Biography Course Description
 
Arvind Agarwal ·Introduction to Nanomanufacturing and Nanotechnology

Richard Ahrenkiel ·Fundamentals of Semiconductor Characterization: Electrical and Optical Techniques

Gary S. Ash ·Cryopump Technology

Steve Barber ·Basics of Radio Frequency Technology

Michael Benapfl ·Fundamentals of Vacuum Technology
·Vacuum Leak Detection

Bharat Bhushan ·Adhesion and Stiction: Mechanisms, Measurement Techniques, and Methods for Reduction

Peter Biltoft ·Fundamentals of Vacuum Technology
·Recent Advances in Vacuum Technology

Joel Bowers ·Vacuum Vessel Engineering

C.R. Brundle ·Full Wafer Particle and Defect Detection, Review, and Characterization
·Materials and Surface Microcharacterization and Analysis
·Surface Analysis, Interface, and Thin Film Analysis: The Major Methods
·Thin and Ultra-thin Film Analysis, Characterization & Metrology for the Wafer Processing Industry
·X-Ray Photoelectron Spectroscopy (XPS): The Basics and Advanced Approaches and Applications

David Castner ·Surface Characterization of Biomaterials

John Caughman ·Basics of Radio Frequency Technology

Bob Childs ·Fundamentals of Vacuum Technology

Douglas Chrisey ·Pulsed Laser Deposition for Thin Film Growth

John Coburn ·Plasma Etching and RIE: The Fundamentals and Applications

Timothy Coutts ·Semiconductor Contacts: Their Science, Fabrication, and Characterization
·Technological Aspects of Metal/Semiconductor Contacts
·Transparent Conducting Oxides: Their Science, Fabrication, Properties, and Applications

John Crowell ·CVD for Microelectronics

Michael Current ·Ion Implantation: Fundamentals, Process Controls and Advanced Applications

Tom Dory ·Semiconductor Device Manufacturing Overview

John Frankenthaler ·Photolithography Process in IC Production

Steve George ·Atomic Layer Deposition

Tim Gessert ·Fundamentals of Vacuum Technology
·Controlling Contamination in Vacuum Pump Systems

Abe Ghanbari ·Introduction to Ion Sources: Principles and Techniques
·Plasma and Ion Beam Diagnostics: Principles & Applications

John Givens ·Chemical Mechanical Planarization for Microelectronics Manufacturing
·Copper Interconnect Technology

Stanley Goldfarb ·Partial Pressure Analysis

John Grant ·Auger Electron Spectroscopy
·Comprehensive Course on Surface Analysis: AES, SIMS, XPS, and Depth Profiling
·Data Processing in XPS/ESCA and AES
·Depth Profiling
·XPS/ESCA Fundamentals
·Comprehensive Course on Surface Analysis: AES, SIMS, and XPS/ESCA
·XPS/ESCA Comprehensive
·X-ray Photoelectron Spectroscopy

Joe Greene ·Growth of Self-assembled Nanostructures
·Nucleation, Growth, and Microstructure Evolution
·Sputter Deposition

Luke Hinkle ·Mass Flow Controllers: Fundamentals, Techniques, and Applications
·Process Specific Pumping Requirements and Design

Paul Holloway ·Fundamentals of Vacuum Technology
·Operation & Maintenance of Vacuum Pumping Systems

Frank Jansen ·Plasma-Enhanced CVD: Fundamentals, Techniques, and Applications

Bob  Langley ·Partial Pressure (RGA) Analysis

Allan Matthews ·Hard Coatings by PVD Methods

Richard Matyi ·High Resolution X-ray Reflection and Diffraction Methods for Thin Film Characterization

Gary McGuire ·IC Microdevice Fabrication
·Low-k and Other Interlayer Dielectrics
·Surface Preparation for Thin Film Deposition

John Orloff ·Focused Ion Beams: Principles and Applications

Ronald Outlaw ·Fundamentals of Vacuum Technology
·UHV Design and Practices

Stella Pang ·Microfabrication Technology for MicroElectroMechanical Systems

Howard Patton

·Controlling Contamination in Vacuum Systems

·Fundamentals of Vacuum Technology
·Operation & Maintenance of Vacuum Pumping Systems
·Vacuum System Design

Neil Peacock ·Total Pressure Gauging Techniques
·Vacuum Sealing and Joining Techniques

Karen Reinhardt ·Cleaning and Surface Conditioning Techniques for Integrated Circuit Manufacturing

Mikko Ritala ·Atomic Layer Deposition: Fundamentals, Chemistry and Applications

Angus Rockett ·Sputter Deposition
·Photovoltaics: The Engineering, Technology, and Application of Solar Cells

Bridget Rogers ·Semiconductor Device Manufacturing Overview

Phillip Russell ·Atomic Force and Scanning Tunneling Microscopy
·Scanning Electron Microscopy and X-ray Microanalysis

Sudipta Seal ·Introduction to Nanomanufacturing and Nanotechnology

Gary Selwyn ·Optical Diagnostic Techniques for Plasma Processing

Randy Shul ·Plasma Etching and RIE: The Fundamentals and Applications

Jack Singleton ·Fundamentals of Vacuum Technology
·Operation & Maintenance of Vacuum Pumping Systems

T.C. Smith ·Ion Implantation Processing

William Sproul ·Hard Coatings by PVD Methods
·Sputter Deposition

Larry Stelmack ·Introduction to Ion Beam Coating Deposition Techniques

Fred Stevie ·Comprehensive Course on Surface Analysis: AES, SIMS, and XPS/ESCA
·Comprehensive Course on Surface Analysis: AES, SIMS, XPS, and Depth Profiling
·Focused Ion Beams: Principles and Applications
·Secondary Ion Mass Spectrometry

Robert Waits ·Application of Residual Gas Analysis in Thin Film Processes
·Physical and Chemical Vapor Deposition
·Thin Film Deposition by Evaporation

Woody Weed ·Recent Advances in Vacuum Technology
·Vacuum Pumps

Randy Shul ·Plasma Etching and RIE: The Fundamentals and Applications

Bill Westwood ·Reactive Sputtering and Deposition
·Sputter Deposition

Questions? Contact Heather Korff, heather@avs.org, 530-896-0477

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