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AVS is a nonprofit organization that promotes communication, education, networking, recommended practices, research, and the dissemination of knowledge on an international scale, in the application of vacuum and other controlled environments to understand and develop interfaces, new materials, processes, and devices through the interaction of science and technology.
 
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More About JVST B

Microelectronics and Nanometer Structures: Processing, Measurement, and Phenomena
The Journal of Vacuum Science and Technology B is devoted to reports of original research, review articles, and Critical Review articles. The JVST B has been established to provide a vehicle for the publication of research dealing with microelectronics and nanometer structures. The emphasis will be on processing, measurement and phenomena, and will include vacuum processing, plasma processing, materials and structural characterization, microlithography, and the physics and chemistry of submicron and nanometer structures and devices. The journal also publishes papers from conferences and symposia that are sponsored by the AVS and its divisions. JVST B is published six times annually (Jan/Feb, Mar/Apr, May/Jun, Jul/Aug, Sep/Oct, Nov/Dec) by the AVS through the American Institute of Physics (AIP).

Editor:
Gary E. McGuire
International Technology Center
P.O. Box 13740
Research Triangle Park, NC 27709
(919) 824-8479

Publications Office Manager:
Nancy Schultheis

Editorial Assistant:
Estella K. Stansbury
Journal of Vacuum Science and Technology
100 Park Drive, Suite 105, Caller Box 13994
Research Triangle Park, NC 27709
Telephone: (919) 361-2787 / (919) 361-2342
Fax: (919) 361-1378
e-mail: jvst@jvst.org

Associate Editors:
Brian Holloway (’09) College of William and Mary
David Janes (’09) Purdue Univ
Eric Kay, Review Articles
Robert Opila ('10) University of Delaware
Christopher J. Palmstrom (’11), Univ. of California at Santa Barbara
G. Parsons, NCSU, JVST Letters
Fan Ren ('10) University of Florida
Olga Shenderova (’09) International Technology Center
Robert M. Wallace (’11), University of Texas at Dallas
 

AVS Publication Committee:
Chair: Mark H. Engelhard, Pacific Northwest Natl. Lab.
Gregory J. Exarhos, Pacific Northwest Natl. Lab.
Sergei Kalinin, Oak Ridge Natl. Lab.
Ivan Petrov, Univ. of Illinois
J. William Rogers, Jr., Idaho Natl. Lab.
Suzanne L. Rohde, Univ. of Nebraska
Winston Schoenfeld, Univ. of Central Florida

JVST Editorial Board:
Alison Baski (’09) VA Commonwealth University
N.A. Burnham (’09) Worcester Polytechnic Inst
Alain C. Diebold ('10) University of Albany, SUNY
E. R. Fisher (’09) Colorado State University
R. Ramesh (’11) Univ. of California at Berkeley
Bridget R. Rogers ('10) Vanderbilt University
Jack Rowe, ('11), UNC-Chapel Hill
Ellen D. Williams (’11) University of Maryland

JVST Editorial Staff at AIP:
Team Leader: Barbara Carbonaro