Microelectronics and Nanometer Structures: Processing, Measurement, and
Phenomena
The Journal of Vacuum Science and Technology B is devoted to reports
of original research, review articles, and Critical Review articles. The JVST B
has been established to provide a vehicle for the publication of research
dealing with microelectronics and nanometer structures. The emphasis will be on
processing, measurement and phenomena, and will include vacuum processing,
plasma processing, materials and structural characterization, microlithography,
and the physics and chemistry of submicron and nanometer structures and
devices. The journal also publishes papers from conferences and symposia that
are sponsored by the AVS and its divisions. JVST B is published six
times annually (Jan/Feb, Mar/Apr, May/Jun, Jul/Aug, Sep/Oct, Nov/Dec) by the
AVS through the
American Institute of Physics (AIP).
Editor:
Gary E. McGuire
International Technology Center
P.O. Box 13740
Research Triangle Park, NC 27709
(919) 824-8479
Publications Office Manager:
Nancy Schultheis
Editorial Assistant:
Estella K. Stansbury
Journal of Vacuum Science and Technology
100 Park Drive, Suite 105, Caller Box 13994
Research Triangle Park, NC 27709
Telephone: (919) 361-2787 / (919) 361-2342
Fax: (919) 361-1378
e-mail: jvst@jvst.org
Associate Editors:
Brian Holloway (’09) College of William and Mary
David Janes (’09) Purdue Univ
Eric Kay, Review Articles
Robert Opila ('10) University of Delaware
Christopher J. Palmstrom (’11), Univ. of California at Santa
Barbara
G. Parsons, NCSU, JVST Letters
Fan Ren ('10) University of Florida
Olga Shenderova (’09) International Technology Center
Robert M. Wallace (’11), University of Texas at Dallas
AVS Publication Committee:
Chair: Mark H. Engelhard, Pacific Northwest Natl. Lab.
Gregory J. Exarhos, Pacific Northwest Natl. Lab.
Sergei Kalinin, Oak Ridge Natl. Lab.
Ivan Petrov, Univ. of Illinois
J. William Rogers, Jr., Idaho Natl. Lab.
Suzanne L. Rohde, Univ. of Nebraska
Winston Schoenfeld, Univ. of Central Florida
JVST Editorial Board:
Alison Baski (’09) VA Commonwealth University
N.A. Burnham (’09) Worcester Polytechnic Inst
Alain C. Diebold ('10) University of Albany, SUNY
E. R. Fisher (’09) Colorado State University
R. Ramesh (’11) Univ. of California at Berkeley
Bridget R. Rogers ('10) Vanderbilt University
Jack Rowe, ('11), UNC-Chapel Hill
Ellen D. Williams (’11) University of Maryland
JVST Editorial Staff at AIP:
Team Leader: Barbara Carbonaro
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