Plasma Science and Technology Division

Plasma Science and Technology Division Plasma Science and Technology Division

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About the Division

The Plasma Science and Technology Division provides a forum for those interested in the entire range of plasma science and technology, extending from fundamental modeling studies to manufacturing applications.

Common themes at PSTD-supported conferences include:

* Plasma-surface and ion-surface interactions
* Plasma diagnostics and modeling

* Plasma sources and systems

* Pattern transfer and feature profile evolution

* Plasma physics, chemistries and processes

* Plasma-enabled new technologies

2010 Officers and Executive Committee

Chair Catherine Labelle GLOBALFOUNDRIES Ph: 845-892-2415 cathy.labelle@globalfoundries.com	Chair-Elect Matthew Goeckner University of Texas at Dallas Ph: 972-883-4293 goeckner@utdallas.edu		Past Chair Jeffrey Hopwood Tufts University Ph.: 617-253-5045 hopwood@ece.tufts.edu

Secretary Satoshi Hamaguchi Osaka University Ph: 81-66-879-7913 hamaguch@ppl.eng.osaka-u.ac.jp	Treasurer Richard van de Sanden Eindhoven University Ph.: 31-40-247-3474 m.c.m.v.d.sanden@tue.nl		Student Affairs Coordinator Sumit Agarwal Colorado School of Mines Ph.: 303-273-3508 sagarwal@mines.edu

Executive Committee
Jean-Paul Booth CNRS/Ecole Polytechnique +33 169 33 59 02 jean-paul.booth@lpp.polytechnique.fr		Remi Dussart GREMI Ph.: 33-23-849-4872 remi.dussart@univ.orleans.fr

Laurent Vallier CNRS/LTM Ph.: 33-4387-899-14 laurent.vallier@cea.fr		Masaharu Shiratani Kyushu Univ. Ph: 81-092-802-3734 siratani@ed.kyushu-u.ac.jp

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