PSTD - Meetings & Symposia

Advancing the Science and Technology of Materials, Interfaces, and Processing

Technical Programs

The PSTD supports advances in plasma science and technology through sessions, tutorials and topical conferences at the annual AVS International Symposium and Exhibition, and through a number of cosponsored topical conferences throughout the year.

Depending on the theme of a particular session at the International Symposium, it can be jointly organized by the PSTD and other divisions with overlapping interests, such as the Surface Science Division, the Applied Surface Science Division, the Nanometer-Scale Science and Technology Division, the Electronic Materials and Processing Division, and the Manufacturing Science and Technology Topical Group.



ALE 2015:
Atomic Layer Etch Workshop

DATE & LOCATION
July 1-2, 2015, Portland Hilton,
Portland Oregon
 
SCOPE
Extending Moore's law beyond the 10nm node will increasingly rely on high precision processes employing new materials with high-quality surfaces. Atomic layer etch & atomic layer clean technology is a promising pathway to achieve these fundamental requirements. 
 
In conjunction with ALD 2015 (at the Portland Hilton), the AVS Plasma Science and Technology Division will be hosting a workshop on Atomic Layer Etch. The goals of the meeting are to provide research focus, report progress to-date and foster collaboration to accelerate this unique capability. Latest findings are expected from experts at major universities, semiconductor manufacturers and leading equipment suppliers. Topics include, but are not limited to:
  • Surface chemical reactions
  • Ion Energy distributions and control
  • Damage free processes
  • Modeling of processes and discharges
  • Chemistry synthesis for 'reverse ALD'
  • Interesting and new applications for ALE
This year ALD 2015 will be held prior to the ALE 2015 Workshop. 



COMMITTEE:
Chair: Eric A. Joseph, IBM TJ Watson Research Center
  • Satoshi Hamaguchi, Osaka University
  • Craig Huffman, SEMATECH
  • Keren Kanarik, Lam Research
  • Iqbal R. Saraf, IBM Systems & Technology Group, Hopewell Junction, NY
  • Steven Vitale, MIT Lincoln Laboratory

 
WEBSITE & QUESTIONS:
Details are available on the ALD 2015 Website
www.ald-avs.org.

Questions? Contact Della Miller, della@avs.org