PSTD - Meetings & Symposia
Advancing the Science and Technology of Materials, Interfaces, and Processing
The PSTD supports advances in plasma science and technology through sessions, tutorials and topical conferences at the annual AVS International Symposium and Exhibition, and through a number of cosponsored topical conferences throughout the year.
Depending on the theme of a particular session at the International Symposium, it can be jointly organized by the PSTD and other divisions with overlapping interests, such as the Surface Science Division, the Applied Surface Science Division, the Nanometer-Scale Science and Technology Division, the Electronic Materials and Processing Division, and the Manufacturing Science and Technology Topical Group.
DATE & LOCATION
Atomic Layer Etch Workshop
July 1-2, 2015, Portland Hilton,
Extending Moore's law beyond the 10nm node will increasingly rely on high precision processes employing new materials with high-quality surfaces. Atomic layer etch & atomic layer clean technology is a promising pathway to achieve these fundamental requirements.
In conjunction with ALD 2015 (at the Portland Hilton), the AVS Plasma Science and Technology Division will be hosting a workshop on Atomic Layer Etch.
The goals of the meeting are to provide research focus, report progress to-date and foster collaboration to accelerate this unique capability. Latest findings are expected from experts at major universities, semiconductor manufacturers and leading equipment suppliers. Topics include, but are not limited to:
This year ALD 2015 will be held prior to the ALE 2015 Workshop.
Surface chemical reactions
Ion Energy distributions and control
Damage free processes
Modeling of processes and discharges
Chemistry synthesis for 'reverse ALD'
Interesting and new applications for ALE
Eric A. Joseph, IBM TJ Watson Research Center
Satoshi Hamaguchi, Osaka University
Craig Huffman, SEMATECH
Keren Kanarik, Lam Research
Iqbal R. Saraf, IBM Systems & Technology Group, Hopewell Junction, NY
Steven Vitale, MIT Lincoln Laboratory
WEBSITE & QUESTIONS:
Details are available on the ALD 2015 Website
Questions? Contact Della Miller, firstname.lastname@example.org