VTD - Invited Talks

Advancing the Science and Technology of Materials, Interfaces, and Processing

2017

  • Fast-Switching Dual Fabry-Perot Cavity-based Optical  Refractometry – A Powerful Technique for Drift-Free Assessment of Gas Refractivity and Density
    - Ove Axner, Umeå University, Sweden
  • ROSINA/Rosetta: Exploring the origin of our solar system with mass spectrometry in space
    - Kathrin Altwegg, Univ of Bern, Switzerland
  • Weight of water on the solid surface in air and vacuum  
    - Richard Green, NRC, Canada
  • A rigorous approach to effluent gas management for the vacuum processing industry
    - Paul Dozoretz, MKS Instruments, USA
  • Vacuum technology that enabled the detection of gravitational waves
    - Rai Weiss, LIGO/MIT, USA
  • Adsorption/Desorption from amorphous carbon coating at cryogenic temperatures
    - Anne-Laure Lamure, CERN, Switzerland
  • Quantum Approach to Extreme High Vacuum Metrology
    - Julia Scherschligt, NIST, USA
  • Particle Contamination Control in the accelerator vacuum systems of the European XFEL
    - Lutz Lilje, DESY, Germany
  • UHV- and cryo-transfer between independent analytical instruments
    - Urs Maier, Ferrovac, Switzerland
  • Silicon-micromachined Turbomolecular Pump
    - Wei Yang
  • New aspects on heavy ion-induced desorption and their impact on next generation accelerators
    - Markus Bender, GSI, Germany
  • Development, Solution of Design Issues, Final Design and Performance of an Electrostatic Triode Getter-Ion Pump, 1967- 1973
    - Paul Arnold, MKS Instruments, USA
  • Superlubricity of Hard Compliant Carbon Coatings  with green lubricants: Role of Surface Chemistry and Structural Changes
    - Maria-Isabel De Barros Bouchet, Ecole Centrale de Lyon - LTDS, France
  • Structure Evolution in Tribological Interfaces Studied by Multilayer Model Alloys
    - Martin Dienwiebel, KIT, Germany
  • Studying Dynamic and Structured Plasma Systems Utilizing Laser-Collision Induced Fluorescence
    - Ed Barnat, Sandia National Laboratory, USA
  • In-Situ Diagnostics of Processing Plasma and Semiconductor Films for High-Efficiency Silicon Hetero-            Junction Solar Cells
    - Shota Nunomura, AIST, Japan

2016

  • Industry Practice for Using Primary Leak Standards to Validate Calibration Methods
    Jason Alfrey, Vacuum Technology INC
  • Vacuum Adventures on the Way Towards a Field-Portable Helium Isotope Detector
    Gary McMurtry, University of Hawaii
  • Applicative Challenges for today’s Turbo Molecular Pumps
    Adrian Wirth, Pfeiffer Vacuum GmbH, Germany
  • Vacuum System Analysis of a Next Generation Light Source with Synrad and MolFlow+
    Jason Carter, Argonne National Laboratory
  • Vacuum Design of the European Spallation Source Target Monolith
    Peter Ladd, European Spallation Source, Sweden
  • Saving Megawatts in a Micron: Tailoring the Surfaces of Superconducting RF Cavities
    Sam Posen, Fermi National Accelerator Laboratory
  • High Quality Vacuum Components for UCV and UHV Applications
    Michael Flämmich, VACOM, Vakuum Komponenten & Messtechnik GmbH, Germany
  • Vacuum Transport for Realization and Dissemination of the Redefined Kilogram at NIST
    Eric Benck, NIST
  • It's All Because of the Vacuum...
    - Frederick Dylla, American Institute of Physics
  • The Next Generation Quantum-based Metrology for Miniaturized Sensors and Standards
    - Gregory F. Strouse, National Institute of Standards and Technology

2015

  • The Evolution of Cryopumps
    - Sergei Syssoev, Brooks Automation, Chemsford, MA
     
  • MAXIV Vacuum System: From Design to Operation
    - Eshraq Al Dmour, Max IV, Lund University, Lund Sweden
     
  • Double Deflection and Enhanced Detection - The Use of a Novel Ion Optics for Metastable Rejection and Improved Detection in the Low ppb Range.
    - Jonathon Leslie, MKS Instruments, Inc., Andover, MA
     
  • The Deployment of a Commercial RGA to the International Space Station
    - Matt Kowitt, Stanford Research Systems, Sunnyvale, CA
     
  • History of Widely-used Vacuum Gauges and the Variations and Motivations that Occurred Along the Way: How Did We Get Where We Are?
    - Paul Arnold, MKS Instruments, Inc., Granville Phillips Product Center, Longmont, CO
     
  • Current Advances in Materials and Methods for UHV and XHV Environments
    - Jed Bothell, Atlas Technologies Port Townsend WA
     
  • Current Advances in Materials and Methods for UHV and XHV Environments
    - Austin Henry, Atlas Technologies Port Townsend WA
     
  • Plasma Cleaning of SEMs and Large Vacuum Systems
    - Ron Vane, XEI Scientific Inc., Redwood City, CA
     
  • Mobile Vacuum Environments and Their Applications for Semiconductor Manufacturing
    - Daniel Babbs, Brooks Automation, Chelmsford, MA
     
  • Experience of UHV Transportation of Critical Components
    - Paolo Michelato, Italian National Institute for Nuclear Physics (INFN), Milan, Italy
     
  • Particle Behavior in Vacuum Systems: Protection Schemes for EUVL Critical Surfaces, Speed Controlled Particle Injection, Prevention of Particle Formation during Pump Down
    - David Pui, University of Minnesota, Minneapolis, MN

2014

  • Miniature Fiber Optic Pressure Sensors: Technologies and Applications
    -Miao Yu, University of Maryland, College Park
     
  • How to Create as Less as Possible to Make the Best as Possible
    -Norbert Koster, TNO Technical Sciences, Netherlands
     
  • Novel Vacuum Processing of Thin-Film Photovoltaic Materials
    -Jason Myers, U.S. Naval Research Laboratory
     
  • Gas Dynamics Modelling Efforts at CERN
    -Roberto Kersevan, CERN,Switzerland
     
  • Improving the Performances of Getter Pumps: Recent Developments in NEG Technology
    -Fabrizio Siviero, SAES Getters, Italy

     
  • Advanced High Speed Water Vapor Cryopumps: Enabling Today’s Vacuum Processes
    -Kevin Flynn, Brooks Automation, Inc., Polycold
     
  • Our Present Understanding of Outgassing
    -Manfred Leisch, Graz University of Tech., Austria
     
  • Ultimate Limits in the Gas Composition Determination Within Small Sealed Volumes by Quadrupole Mass Spectrometry
    -Vincenc Nemanic, Jozef Stefan Institute, Slovenia
     
  • Vacuum Technology Developments at Daresbury Laboratory for Modern Accelerators
    -Keith Middleman, (Presented by: O.B. Malyshev), STFC Daresbury Laboratory, UK
     
  • Progress in Thin Film Technology for Superconducting RF Applications
    -Anne-Marie Valente-Feliciano, Thomas Jefferson National Accelerator Facility
     
  • Load locks, Transfer arms, and other In-Vacuum Motions in the Cornell DC Photoelectron Gun Development Project
    -Karl Smolenski, Cornell University
     
  • Design Optimization and Fabrication Progress of ITER’s Large Custom Vacuum Pumps
    -Robert Pearce, Oak Ridge National Laboratory


2013

  • The Important Role of Vacuum Technology in the Redefinition of the Kilogram
    -P.J. Abbott; NIST
  • Modeling and Simulation of Fast Flows in the Vacuum Regime,
    -S. Pantazis; Physikalisch-Technische Bundesanstalt (PTB), Germany
  • 60 Years of Vacuum Gate Valve Developments
    -J.F. Hartnett; Vacuum Research Corporation
  • A History of Vacuum from My Perspective!
    - K.J. Lesker III, K.J. Lesker IV; Kurt J. Lesker Company
  • How We’ve Learned More & More About Less and Less So That Now We Know a Whole Lot About Nearly Nothing - Vacuum Measurement Over the Years
    - S.R. Goldfarb; Consultant
  • The Quest for Extreme High Vacuum
    -H.F. Dylla; American Institute of Physics
  • The Relationship Between Moisture Ingress, Hermeticity Testing, and Internal Gas Analysis (IGA) of Hermetic Structures
    -J.C. Pernicka; Pernicka Corporation
  • Applications and Limitations of Wear-Resistant PVD Coatings
    -A. Mueller, OC Oerlikon Balzers AG, Liechtenstein
  • Optics Contamination in EUV Lithography: Measurement, Modeling and Mitigation
    -S.B. Hill, N.S. Faradzhev, T.B. Lucatort;  National Institute of Standards and Technology (NIST), B.V. Yakshinskiy, R.A. Bartynski; Rutgers University
  • Recent Innovation in Dry Pumping Technology
    -A.D. Chew, I. Stones, N. Schofiel;  Edwards, UK
  • Symbiotic Relation between High Energy Accelerators and Advanced Medical Treatments
    -J.R. Noonan, D.R. Walters; Argonne National Laboratory
  • Growth and Characterization of High Quantum Efficiency Photocathodes for the Cornell ERL R&D Project
    -L. Cultrera, I. Bazarov, B. Dunham, Y. Li, X. Liu, A. Bartnik, K. Smolenski, S. Karkare, W. Schaff, T. Moore; Cornell University

2012

  • A Truly Cold Vacuum Gauge for Ultra–high Vacuum and Extreme–high Vacuum Employing a Hydrogen Absorber
    -G.A. Mulhollan; Saxet Surface Science First International
  • Comparison of Standard Leak Calibrations of Metrological Institutes
    -K. Jousten, K. Arai, U. Becker, O. Bodnar et.al; PTB, Germany
  • Mass Spectrometry a Mile Deep: Issues and Solutions for Underwater Vacuum Systems
    -R.T. Short; SRI International
  • Gas Dynamics Modelling for Particle Accelerators
    -O.B. Malyshev; STFC Daresbury Laboratory, UK
  • Design of the Vacuum System for the SuperKEKB Positron Ring
    -Y. Suetsugu, K. Kanazawa, K. Shibata, T. Ishibashi, H. Hisamatsu, M. Shirai, S. Terui; High Energy Accelerator Research Organization, Japan
  • Contamination Control and Cleaning Techniques for Ultra Clean Vacuum Systems
    -H.C.G. Werij, N.B. Koster, J.C.J. van der Donck, A.J. Storm, R. Verberk, R. Versluis; TNO Technical Sciences, The Netherlands
  • Superconducting Niobium for Accelerator Cavities: Status and prospects (VT+AS+SS)
    -M.J. Kelley; Jefferson Lab and College of William and Mary

2011

  • Extending the Range of the Spinning Rotor Gage for Vacuum Measurements and Calibrations
     -M.L. Duncan, J.A. Keck; Oak Ridge National Laboratory
     
  • Numerical Methods for the Design of Vacuum Systems with Examples
    -R. Kersevan; ITER International Organization, France
     
  • Low Uncertainty Measurements of Trace Water Vapor Based on Cavity Ring-Down Spectroscopy
    -T. Hodges; National Institute of Standards and Technology
     
  • Status of National Synchrotron Light Source II Vacuum Systems
    -H.C. Hseuh, A. Blednykh, L. Doom, M.J. Ferreira, C. Hetzel, J.P. Hu, S. Leng, C. Longo, V.Radindranathh, K. Roy, S. Sharma, F. Willeke, K. Wilson, D. Zigrosser; Brookhaven National Laboratory
     
  • Examples of Surface Related R&D on Nb Samples and SRF Cavities for Particle Accelerators at JLab
    - A.T. Wu; Thomas Jefferson National Accelerator Facility
     
  • New UHV Low Temperature Scanning Probe Microscopy Facility for the Study of Future Electronic Materials
     -J.A. Stroscio; National Institute of Standards and Technology
     
  • Modelling and Simulation of the ITER Cryopumping Systems
    -Chr. Day; Karlsruhe Institute of Technology, Germany
     
  • Waste Not, Want Not
    -L.V. Mannes; South Park Platinum, Inc.

2010

  • Practical Issues and Applications for Vacuum and Hermetic Microsystems Packaging
     -K. Ewsuk
     
  • Miniature Mass Spectrometers and Ambient Analysis by Mass Spectrometry
     -R.G. Cooks
     
  • Point-of-Use Abatement Devices and Exhaust Management Strategies
    -J. Brown
     
  • Architecture and Operation of the Z Pulsed Power Facility Vacuum System
    -J.W. Weed 

2009

  • Silicon-based Surface Treatments for Improved Vacuum System Throughput, Inertness, and Corrosion Resistance
    -D.A. Smith
     
  • A Novel Electrostatic Ion Trap Mass Spectrometer
    -B.J. Hinch
     
  • Gas Dynamics Aspects of Atomic Layer Deposition
    -S.M. George
     
  • Vacuum R&D at Cornell Towards to Cornell Electron Storage Ring Test Accelerator for ILC Damping Ring and the ERL-based Light Sources
    -Y. Li

2008

  • A Review of the Development of Cleaning Processes and Cleanliness Assessment at Daresbury Laboratory
     -J.D. Herbert
     
  • Sorption Properties of Non Evaporable Getter Pumps for Selected Hydrocabons and Organic Compounds
    -A. Conte
     
  • LHC Beam & Insulation Vacuum Systems
    -J.M. Jimenez
     
  • Vacuum Metrology in Korea, Value Innovation for Customers
    -K.H. Chung
     
  • Molybdenum Oxide Nanoparticles for Improved Lithium Ion Battery Technologies
    -A.C. Dillon

2007

  • Miniature High Vacuum Pump for Mars Analytical Instruments
    -R.J. Kline-Schoder
     
  • Development of MEMS for Space Applications
     -P.W. Valek
     
  • The Role of Vacuum-Based Processes in Developing High Performance Chemical Microsensors
    -S. Semancik
     
  • Review of Seven Years Field Application Experience of an EPX Single Mechanism for High Vacuum Pumping
    -A.D. Chew
     
  • Surface Morphology and Surface Composition of Vacuum Fired Stainless Steel
    -M. Leisch
     
  • Recent Advances to Enhance Space Simulation
    -F.G. Collins

2006

  • “Limiting Processes in Vacuum Measurement”
    -P. Looney
     
  • “Extreme High Vacuum (XHV): The Need, Production and Measurement”
    -M.L. Stutzman
     
  • “Outgassing of Construction Materials for Vacuum Chambers and Coatings for Reduction of Outgassing”
    -J. Setina
     
  • “New Understanding of Ion-Beam Induced Gas Desorption”
     -A.W. Molvik
     
  • “Experimental Investigation of the Near-Earth Space”
    -M. Wüest
     
  • “Report from the Mars Chapter”
    -M.H. Hecht
     
  • “Benjamin Franklin and the Meaning of Public Science”
    -J.E. Chaplin
     
  • “Monolayers Films: From Franklin's OIl-Drop Experiments to Self-Assembled Monolayer Structures”
    -G.L. Richmond
     
  • “The Science and Technology of Electrophotography”
    -L.B. Schein
     
  • “From Lightning to Lighting: Physics and Technology Discharged from Franklin's Kite Experiment”
    -R.T. McGrath
     
  • “Progress and Prospects in the Generation of High Voltage”
    -H.F. Dylla

2005

  • “Selecting Vacuum Instrumentation for Your Applications”
    -C.R. Tilford
     
  • “Pressure Dependence of Laminar-Turbulent Transition in Gases”
    -L.D. Hinkle
     
  • “Hydrogen in Vacuum Systems: An Overview”
    -R.A. Outlaw
     
  • “Hydrogen in Vacuum Systems”
     
  • B. Hjörvarsson

2004

  • “John Ambrose Fleming and the Beginning of Electronics”
    -H.F. Dylla
     
  • “Vacuum and the Electron Tube Industry”
    -P. Redhead
     
  • “The Science and Technology of Pumping Residual Gases in Vacuum Tubes”
    -B. Ferrario
     
  • “Vacuum Microelectronic Devices and Vacuum Requirements”
    -G.E. McGuire
     
  • “Ultra Cleaning Techniques and Their Use in Vacuum Technology”
    -P.H. LaMarche
     
  • “Contamination Control in PECVD Processes”
    -B. Shin
     
  • “An Overview of the Spallation Neutron Source Vacuum Systems”
     -P. Ladd

2003

  • “Fifty Years of Vacuum Science”
    -E.V. Kornelsen
     
  • “The Measurement of Vacuum;1950-2003”
     -P.A. Redhead
     
  • “Major Advances in Capture Pumps in the Last 50 Years”
    -K.M. Welch
     
  • “Major Advances in Transfer Pumps; 1953-2003”
    -M.H. Hablanian
     
  • “The Development of Ultrahigh and Extreme High Vacuum Technology for Physics Research”
    -H.F. Dylla
     
  • “Quartz Capillary Gas Flow Meters”
    -R.F. Berg
     
  • “How to Control Hydrogen Outgassing from Gauges and Materials”
    -F. Watanabe
     
  • “Residual Gas in the LIGO Beam Tubes: Science, Arts and Recipes”
     -R. Weiss
     
  • “Component Requirements for ALD Technology”
    -T.E. Seidel
     
  • “The Role of Outgasssing, Outdiffusion and Desorption in Vacuum Coating”
     -D.M. Mattox
     
  • “Vacuum Thermal Insulation - Inventions for the Future”
    -V. Nemanic

2002

  • “Self-Assembled Monolayers of Carboxy-Terminated Poly(ethylene glycol): Protein Resistance, Biospecific Functionalization and Application to Immunodiagnostics”
    -R. Dahint
     
  • “Analysis of Organic and Biological Materials in Ultra-High Vacuum”
     -D.G. Castner
     
  • “Design Fabrication and Processing of Vacuum Chambers for High Energy Accelerators at Brookhaven”
     -H.C. Hseuh
     
  • “Advanced Materials and Fabrication Techniques for the Next Generation Light Source”
     -J.R. Noonan
     
  • “Gaede Langmuir Award Address: The Impact of Non-evaporable Getters on the Evolution of UHV/XHV Technology”
     -C. Benvenuti
     
  • “Ultra-sensitive Detection of Helium Release from Metal Tritides”
     -J. Poths
     
  • “Influence of Thermal and Surface Treatments on the Outgassing Of Austenitic Stainless Steels Studied by Thermal and Electron Stimulated Desorption”
    -P. Chiggiato
     
  • “Eight Unconventional Gauges: A User's Impressions”
    -B.R.F. Kendall
     
  • “Using DeviceNet for Improved Vacuum Monitoring”
    -C.E. Karlsen
     
  • “Modeling Molecular Drag Pumping in the 20th Century: A Personal View”
     -J.C. Helmer

2001

  • “Sealed Vacuum Systems including Vacuum Insulation”
     -I.P. Della Porta
     
  • “Precision Multilayered Thin Films for Manufacturing of the Next Generation of Computer Chips”
     -E Spiller
     
  • “Gold Nanoparticle Films via Inert Gas Deposition: Biased Percolation and Current Induced Organization During and after Deposition”
     -L.B. Kish
     
  • “Towards the Single Pump Solution - A Recent Advance in High Speed Machines for Dry Vacuum Pumping”
    -R.G. Livesey
     
  • “Water Vapor Capture Within a Vacuum Chamber - The Technology of Meissner Cryopumping Yesterday and Today”
    -D.J. Missimer
     
  • “History of Alcatel Turbomolecular Pump Development”
     -R. Mathes
     
  • “Turbine-type Pumps in High-vacuum Technology”
    -M.H. Hablanian
     
  • “New Results on Outgassing of Stainless Steel and Insulators”
    -L. Westerberg
     
  • “A Different View on the "Water Problem"
    -R.W. Dobrozemsky 
     
  • “Performance Test of Vacuum Components and System”
    -K.H. Chung
     
  • “Residual Gas Analysis using Microengineered Systems”
    -S. Taylor
     
  • “Advances in Semiconductor Physical Vapor Deposition Equipment; Vacuum, System Architecture, and PVD Source Technology”
     -D.J. Harra
     
  • “Vacuum System Architecture for Disk and Flat Panel Production Tools”
     -J. Busch
     
  • “Downstream Effluent Management Subsystems for Semiconductor Manufacturing Processes”
    -Y. Gu
     
  • “RHIC Commissioning and First Results”
    -S. Ozaki

2000

  • “Field Emission Characteristics of Carbon Nanotubes”
    -B.R. Chalamala
     
  • “Reliability of Silicon-based Field Emission Displays”
    -T. Akinwande
     
  • “Illumination Sources for Laser-based Displays”
    -B. Bischel
     
  • “Challenges in Bringing Green Manufacturing Technologies to the Clean Room Floor”
    -S. Raoux
     
  • “Eliminating Perfluorocompound Gas Emissions from CVD Chamber Cleans”
    -P.J. Maroulis
     
  • “Treatment of Wastes from Chemical Mechanical Polishing Operations”
    -S. Raghavan
     
  • “Advanced Chemicals for Semiconductor Processing”
    -E.R. Sparks
     
  • “The United States Constitution and Vacuum Technology”
    -C.R. Tilford
     
  • “The Role of Two-dimensional Compressibility in Physisorption, Competitive Adsorption and Dynamic Displacement”
    -G.A. Kimmel
     
  • “Free Jets in Vacuum Technologies”
    -A.K. Rebrov
     
  • “Design, Construction and Maintenance of Large Vacuum Systems”
    -K.M. Welch
     
  • “The Interesting and Important Problem of Water in Vacuum Systems”
    -H.F. Dylla
     
  • “Miniature Vacuum Pumps”
    -J.W. Weed
     
  • “A Practical Guide to the use of Bayard-Alpert Ionization Gauges”
    -J.H. Singleton
  • “Micromechanical Devices for Force Measurement”
     -T.W. Kenny
     
  • “Developing MEMS Vacuum Pumps”
    -E.P. Muntz
     
  • “Nanotribology and Stiction Studies of Surface Micromachined Electrostatic Micromotors Using An Atomic Force/Friction Force Microscope”
     -B. Bhushan

1999

  • “Effects of Residual Gas Exposures on the Emission Characteristics of Field Emission Arrays”
    -R.M. Wallace
     
  • “Hermetic Sealing and Evacuation of Candescent's ThinCRTTM”
     -T.S. Fahlen
     
  • “Enhanced Bayard-Alpert Gauge with Accuracy and Stability Improved by Design and Construction”
    -P.C. Arnold
     
  • “Vacuum Systems, Deposition Sources, Measurement and Control Tools for the Semiconductor Industry (1950-1975)”
    -D.E. Meyer
     
  • “Evolution of Integrated Circuit Vacuum Processes: 1962-1975”
     -R.K. Waits
     
  • “Refining Old Vacuum Knowledge for Today's Semiconductor Manufacturing Processes”
    -J.F. O'Hanlon
     
  • “Review of Pumping by Thermal Molecular Pressure”
    -J.P. Hobson
     
  • “Dry Vacuum Pumps - A Method for the Evaluation of the Degree of Dry”
    -A.D. Chew
     
  • “Ebara AAS-series Screw-type Dry Vacuum Pump”
    -Y. Watanabe
     
  • “Adapting Dry Vacuum Technology to Cu CVD Effluent Abatement in Integrated Circuit Manufacturing”
    -J.R. Bottin
     
  • “Dry Pumping”
    -P. Annandale
     
  • “The Dry Pump in the Industrial Market”
    -J. Scherbik
     
  • “Review of Models for the Outgassing of Water Vapor from Metallic Surfaces”
    -B.B. Dayton
     
  • “Quadrupole Mass Spectrometry using MEMS”
    -S. Taylor
     
  • “John A. Thornton Memorial Award Lecture: The Search for Improved Transparent Conducting Oxides: An Investigation of CdO, Cd2SnO4, and Zn2SnO4”
    -T.J. Coutts
     
  • “Experiences on the Preparation and Assembly of The Superconducting Linear Accelerator for the TESLA Test Facility”
    -A. Matheisen

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"Feeling connected to the larger scientific community is very important. An award is the nicest kind of connection, saying that your work is appreciated by your peers"

Dr. Jerry Tersoff, IBM T.J. Watson,

Research Center

[on receiving the 2007 AVS Medard W. Welch Award]