Short Course Catalog
| Evaporation for Thin Film Deposition
Course: Evaporation for Thin Film Deposition
Learn about a broad range of evaporation techniques: technology and fundamentals
Understand evaporation mechanisms
Review of gas kinetics
Evaporation and equilibrium vapor pressure (thermodynamics and kinetics)
Thermal and electron beam evaporation sources: materials issues
Deposition rate monitors: advantages and disadvantages
Evaporation of alloys and compounds: kinetics and materials considerations
MBE (solid source and gas source): system design and film growth kinetics
The role of energetic particles: ion plating, ion-beam assisted deposition, etc.
Processes controlling film growth and properties
Stress evolution in evaporated films
Thermal evaporation is employed in a very wide variety of film-growth processing technologies with applications ranging from optics, magnetics, and microelectronics to wear and corrosion resistance to functional and decorative coatings. This course provides an understanding of thermal evaporation and related processes; the relationship between evaporation rate and vapor pressure; flux directionality; and film thickness uniformity. Advantages and disadvantages of common and specialized evaporation sources including filaments, boats, effusion cells, Knudsen cells, and electron beam sources are described with examples. Reactive evaporation of compounds such as oxides, nitrides, sulfides, etc. is compared with ion-assisted techniques including ion plating, activated-reactive evaporation, pulsed-laser deposition, and vacuum-arc deposition for compositional control of complex materials. The use of in-situ
deposition rate monitors including quartz crystal oscillators and optical spectroscopy is also covered.
Fundamental aspects, as well as the technology, of thin film nucleation and growth by evaporation are discussed and highlighted with many examples.
Who Should Attend?
Scientists, engineers, students, technicians, and others involved in the deposition of thin films by evaporation who want to understand the effects of operating parameters on the properties of metal, semiconductor, compound, and alloy films.
Professor of Materials Science and Head of Electronics Materials Division, University of Illinois
Head for Department of Metallurgical and Materials Engineering, Colorado School of Mines
Detailed course notes with extensive reference lists provided.