Short Course Catalog | Analysis of Mass Spectrometer (RGA) Spectra

Course: Analysis of Mass Spectrometer (RGA) Spectra

Course Objectives

  • Provide the basic knowledge required to interpret mass spectrometer (RGA) data, in vacuum applications ranging from UHV to atmospheric pressures.
  • Presentation of elementary atomic electron structure
  • Describe the filling of the electronic shells and sub shells
  • Discuss molecule formation and the different types of molecular bonds
  • Discuss operation of a mass spectrometer including its major components, i.e. ion source, mass separator, and detector and especially phenomena that occur in the ion source
  • Discuss interpretation of the mass spectrometer spectra by presenting typical spectra for many common molecules and analysis of gas samples containing many different molecules
  • Various types of analysis techniques are presented and many existing data bases are suggested
  • Discuss chemical interactions between mass spectrometers and the sampled gases

Course Description

This course deals with analysis of Mass Spectrometer (RGA) data.  It begins at a very elementary level, first describing atoms then atomic electronic structure.  This is followed by a description of the filling of the electronic shells and sub shells.  Using the information about how atoms are formed, we move to molecule formation and discuss the different types of molecular bonds.  Understanding molecular formation is essential to understanding and interpreting mass spectra. The operation of a mass spectrometer is next described, especially phenomena that occur in the ion source.  Using all this information we begin discussion of the interpretation of the spectra obtained from a Mass Spectrometer.  Typical mass spectrometer spectra are shown and analysis of the spectra is demonstrated.
Various types of data presentation are presented and the preferred presentation order for some different types of analyses is suggested. Also presented are many relevant tables, graphs, and references.

Who Should Attend?

This course was developed mainly for technicians and process engineers. Its main objectives are to impart enough knowledge for the student to analyze spectra, use that analysis to determine what problems may exist in their process chamber, and thereby help in trying to solve these problems.


Gerardo Brucker Gerardo Brucker is Chief Scientist and CTO working at the Granville-Phillips Division of MKS Instruments.
Bob Langley Chief Scientific Officer, Oak Ridge Scientific Consultants

Course Materials

Course Notes

Cost: $690