Short Course Catalog | Vacuum Leak Detection

Course: Vacuum Leak Detection

Course Objectives

  • Learn how to analyze vacuum systems and other closed systems for leaks during operation.
  • Learn to use mass spectrometer leak detectors and residual gas analyzers to locate and measure leaks.
  • Know the most effective ways to connect a mass spectrometer leak detector or residual gas analyzer to a vacuum system.

Course Description

This course is an introduction to the technology and practice of leak detection. It includes a discussion of the types of leaks that are to be expected in vacuum systems and how they affect the leakage rate. The principles of leak detection and the methods of putting these principles into practice are described. Practical techniques for detecting and locating leaks are provided with special attention to making the most effective use of the mass spectrometer leak detector.

Also covered in detail are the various ways in which mass spectrometer leak detectors can be connected to vacuum systems and their effects on obtaining satisfactory results from the test procedures. A method of verifying the effectiveness of the leak detection system before starting a test is described. The use of a residual gas analyzer (RGA), a partial pressure gauge, in detecting leaks and analyzing vacuum system difficulties is also discussed.

Who Should Attend?

Those involved in leak detection of vacuum and other closed systems and those who need to evaluate whether a given leak rate is acceptable or unacceptable. A working knowledge of vacuum equipment and instrumentation and familiarity with the basic equations for throughput, pumping speed, and conductance is helpful.


Tim Gessert Senior Scientist, EPIR Inc.

Course Materials

Course Notes

Cost: $690