Short Course Instructors
| Stella Pang
Stella Pang is a Professor in the Electrical Engineering and Computer Science Department and the Associate Dean for Graduate Education in the College of Engineering at the University of Michigan. From 1981 to 1989, she was with Lincoln Laboratory, Massachusetts Institute of Technology, working on submicrometer technology for microelectronics applications. Her research interests include nanofabrication technology, dry etching and dry deposition for micro-electromechanical, microelectronic and optical devices. She received a Ph.D. in Electrical Engineering and Computer Science from Princeton University in 1981. Dr. Pang has served as conference organizer for the American Vacuum Society (AVS), Electrochemical Society (ECS), Electronic Materials Conference, Institute of Electrical and Electronics Engineers (IEEE), International Microprocesses and Nanotechnology Conference, International Symposium on Electron, Ion, and Photon Beam Technology and Nanofabrication, Material Research Society, and SPIE. She was the editor and author for 16 books, journals, and conference proceedings. Dr. Pang has taught over 18 short courses on microfabrication technology for microelectronic manufacturing and micro-electromechanical systems at AVS, CEI, and SPIE. She is a Fellow of IEEE, ECS, and AVS.