MEMS and NEMS Technical Group

Advancing the Science and Technology of Materials, Interfaces, and Processing

  • The materials science, characterization and reliability of MEMS
  • Fabrication techniques and integration technologies for MEMS
  • Nanoelectromechanical Systems (NEMS)
  • BioMEMS
  • Microfluidics
Email comments or questions


Christian A. Zorman
Ph: 216-486-0757
E-mail: christian_zorman @


Robert Davis
Ph: 801-885-7070
E-mail: robert_davis @


Wayne Hiebert
Ph: 626-395-2550
E-mail: wayne_hiebert @


Susan Burkett
Ph: 205-348-4378
E-mail: susan_burkett @

2018 Program Chair

Sushma Kotru
Ph: 205-348-7235
E-mail: sushma_kotru @

2018 Program Co-Chair

Robert Davis
Ph: 801-885-7070
E-mail: robert_davis @

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