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Short Course Instructors
**Each listed Instructor and Course is an active link that opens to their respective descriptions.
Instructor Biography
Course Description
Richard Ahrenkiel
Fundamentals of Semiconductor Characterization: Electrical and Optical Techniques
Gary S. Ash
Cryopump Technology
Michael Bagge-Hansen
UHV Design and Practices
Bharat Bhushan
Adhesion and Stiction: Mechanisms, Measurement Techniques, and Methods for Reduction
Nanotribology and Nanomechanics and Applications to MEMS/NEMS and BioMEMS/BioNEMS
Joel Bowers
Vacuum Vessel Engineering
Gerardo Brucker
Partial Pressure Analysis with Residual Gas Analyzers
C.R. Brundle
A Comprehensive Course on Surface Analysis and Depth Profiling by X-Ray Photoelectron Spectroscopy (XPS or ESCA), Auger Electron Spectroscopy (AES), Focused Ion Beam Analysis (FIB) and Secondary Ion Mass Spectrometry (SIMS) (2 days)
Major Analytical Techniques other than XPS, AES, FIB, SIMS
Surface Analysis, Interface, and Thin Film Analysis: The Major Methods
X-ray Photoelectron Spectroscopy (XPS or ESCA), and Auger Electron Spectroscopy (AES)
X-Ray Photoelectron Spectroscopy (XPS): The Basics and Advanced Approaches and Applications
David Castner
Surface Characterization of Biomaterials
John Caughman
Basics of Radio Frequency Technology
Bob Childs
An Overview of Applied Vacuum Technology
Fundamentals of Vacuum Technology
Tom Christensen
Introduction to Surface Analysis
John Crowell
CVD for Microelectronics
Michael Current
Ion Implantation: Fundamentals, Process Controls and Advanced Applications
Tom Dory
Semiconductor Device Manufacturing Overview
John Frankenthaler
Photolithography Process in IC Production
Steve George
Atomic Layer Deposition
Tim Gessert
UHV Design and Practices
Controlling Contamination in Vacuum Systems
An Overview of Applied Vacuum Technology
Fundamentals of Vacuum Technology
Vacuum System Design
Operation & Maintenance of Vacuum Pumping Systems
Transparent Conducting Oxides: Applications, Science, Fabrication, and Characterization
Vacuum Leak Detection
Abe Ghanbari
An Introduction to Ion Sources: Principles and Techniques
Plasma and Ion Beam Diagnostics: Principles & Applications
John Givens
Copper Interconnect Technology
Chemical Mechanical Planarization for Microelectronics Manufacturing
Joe Greene
Thin Film Nucleation, Growth, and Microstructural Evolution
Evaporation for Thin Film Deposition
Reactive Sputtering and Deposition
Sputter Deposition
Robert Grubbs
Atomic Layer Deposition: Basic Principles, Characterizations, and Applications
Luke Hinkle
Mass Flow Controllers: Fundamentals, Techniques, and Applications
Process Specific Pumping Requirements and Design
Frank Jansen
Plasma-Enhanced CVD: Fundamentals, Techniques, and Applications
Bob Langley
Analysis of Mass Spectrometer (RGA) Spectra
Allan Matthews
Hard Coatings by PVD Methods
Richard Matyi
High Resolution X-ray Reflection and Diffraction Methods for Thin Film Characterization
Gary McGuire
Surface Preparation for Thin Film Deposition
Stella Pang
Microfabrication Technology for MicroElectroMechanical Systems
Neil Peacock
An Overview of Applied Vacuum Technology
Vacuum Sealing and Joining Techniques
Fundamentals of Vacuum Technology
Total Pressure Gauging Techniques
Vacuum Leak Detection
Karen Reinhardt
Cleaning and Surface Conditioning Techniques for Integrated Circuit Manufacturing
Allen Riddle
Fundamentals of Vacuum Technology
Mikko Ritala
Atomic Layer Deposition: Fundamentals, Chemistry and Applications
Angus Rockett
Atomic Force and Scanning Tunneling Microscopy
Photovoltaics: The Engineering, Technology and Application of Solar Cells (1 day)
Photovoltaics: The Engineering, Technology and Application of Solar Cells (2 days)
Evaporation for Thin Film Deposition
Sputter Deposition
Bridget Rogers
Semiconductor Device Manufacturing Overview
Phillip Russell
Atomic Force and Scanning Tunneling Microscopy
Scanning Electron Microscopy and X-ray Microanalysis
Sudipta Seal
Introduction to Nanomanufacturing
Roger Shrouf
Vacuum and Cryogen Safety
Randy Shul
Plasma Etching and RIE: Fundamentals and Applications
Robert Small
Cleaning and Surface Conditioning Techniques for Integrated Circuit Manufacturing
T.C. Smith
Ion Implantation Processing
William Sproul
Hard Coatings by PVD Methods
Practice of Reactive Sputter Deposition
Sputter Deposition
Thin Film Deposition by Sputter Processes
Larry Stelmack
An Introduction to Ion Beam Coating Deposition Techniques
Fred Stevie
A Comprehensive Course on Surface Analysis and Depth Profiling by X-Ray Photoelectron Spectroscopy (XPS or ESCA), Auger Electron Spectroscopy (AES), Focused Ion Beam Analysis (FIB) and Secondary Ion Mass Spectrometry (SIMS) (2 days)
Focused Ion Beams (FIB) and Secondary Ion Mass Spectrometry (SIMS)
Major Analytical Techniques other than XPS, AES, FIB, SIMS
Secondary Ion Mass Spectrometry
Ron Synowicki
Introduction to Spectroscopic Ellipsometry
Harland G. Tompkins
Introduction to Spectroscopic Ellipsometry
Woody Weed
An Overview of Applied Vacuum Technology
Fundamentals of Vacuum Technology
Vacuum System Design
Vacuum Pumps