Short Course Instructors

Instructor Biography	Course Description
Richard Ahrenkiel	Fundamentals of Semiconductor Characterization: Electrical and Optical Techniques
André Anders	High Power Impulse Magnetron Sputtering (HiPIMS) Fundamentals of Plasmas
Kateryna Artyushkova	Essentials of Accurate and Reliable Surface Analysis using X-ray Photoelectron Spectroscopy (XPS) and Auger Electron Spectroscopy (AES)
Michael Bagge-Hansen	UHV Design and Practices
Bharat Bhushan	Adhesion and Stiction: Mechanisms, Measurement Techniques, and Methods for Reduction Nanotribology and Nanomechanics and Applications to MEMS/NEMS and BioMEMS/BioNEMS
Gerardo Brucker	Analysis of Mass Spectrometer (RGA) Spectra Partial Pressure Analysis with Residual Gas Analyzers
C.R. Brundle	A Comprehensive Course on Surface Analysis and Depth Profiling by XPS or ESCA, AES, FIB and SIMS (2 days) Major Analytical Techniques other than XPS, AES, FIB, SIMS X-Ray Photoelectron Spectroscopy (XPS): The Basics and Advanced Approaches and Applications Surface Analysis, Interface, and Thin Film Analysis: The Major Methods
David Castner	Surface Characterization of Biomaterials
John Caughman	Basics of Radio Frequency Technology (1-day) Basics of Radio Frequency Technology (2-days)
Bob Childs	An Overview of Applied Vacuum Technology Fundamentals of Vacuum Technology*
Tom Christensen	Introduction to Surface Analysis
John Crowell	CVD for Microelectronics
Michael Current	Ion Implantation: Fundamentals, Process Controls and Advanced Applications
Diederik Depla	Reactive Sputtering and Deposition
Tom Dory	Semiconductor Device Manufacturing Overview
John Frankenthaler	Photolithography Process in IC Production
Steve George	Atomic Layer Deposition Atomic Layer Etching
Tim Gessert	Transparent Conducting Oxides: Applications, Science, Fabrication, and Characterization UHV Design and Practices Vacuum System Design An Overview of Applied Vacuum Technology Fundamentals of Vacuum Technology* Controlling Contamination in Vacuum Systems Operation & Maintenance of Vacuum Pumping Systems Vacuum System Leak Detection and Basic Troubleshooting Vacuum Pumps: An Introduction to their Operation and Maintenance
Abe Ghanbari	An Introduction to Ion Sources: Principles and Techniques Plasma and Ion Beam Diagnostics: Principles & Applications
Lucille A. Giannuzzi	Introduction to FIB Instrumentation, Applications, and Methods
John Givens	Chemical Mechanical Planarization for Microelectronics Manufacturing Copper Interconnect Technology
Dan Graham	Time of Flight Secondary Ion Mass Spectrometry
Robert Grubbs	Atomic Layer Deposition: Basic Principles, Characterizations, and Applications Plasma-enhanced CVD: Fundamentals, Techniques, and Applications
Edwin E. Harrow	Cryopump Technology
Erwin Kessels	Plasma-enhanced Atomic Layer Deposition: Basics, Equipment, Applications
Allan Matthews	Hard Coatings by PVD Methods
Richard Matyi	High Resolution X-ray Reflection and Diffraction Methods for Thin Film Characterization
Gary McGuire	Surface Preparation for Thin Film Deposition
Stella Pang	Microfabrication Technology for MicroElectroMechanical Systems
Neil Peacock	Vacuum Sealing and Joining Techniques Vacuum System Layout, Design Whys, Use, and Troubleshooting An Overview of Applied Vacuum Technology Fundamentals of Vacuum Technology* Vacuum System Leak Detection and Basic Troubleshooting Total Pressure Gauging Techniques
Rick Reidy	Cleaning and Surface Conditioning Techniques for Integrated Circuit Manufacturing
Karen Reinhardt	Cleaning and Surface Conditioning Techniques for Integrated Circuit Manufacturing
Allen Riddle	Fundamentals of Vacuum Technology*
Mikko Ritala	Atomic Layer Deposition: Fundamentals, Chemistry and Applications
Angus Rockett	Evaporation for Thin Film Deposition Sputter Deposition Photovoltaics: The Engineering, Technology and Application of Solar Cells (1 day) Photovoltaics: The Engineering, Technology and Application of Solar Cells (2 days)
Bridget Rogers	Semiconductor Device Manufacturing Overview
Sudipta Seal	Introduction to Nanomanufacturing
Roger Shrouf	Vacuum and Cryogen Safety
Randy Shul	Plasma Etching and RIE: Fundamentals and Applications
Robert Small	Cleaning and Surface Conditioning Techniques for Integrated Circuit Manufacturing
TBD	Practice of Reactive Sputter Deposition Thin Film Deposition by Sputter Processes Thin Film Nucleation, Growth, and Microstructural Evolution Focused Ion Beams (FIB) and Secondary Ion Mass Spectrometry (SIMS) Scanning Electron Microscopy and X-ray Microanalysis Atomic Force and Scanning Tunneling Microscopy Vacuum Vessel Engineering
T.C. Smith	Ion Implantation Processing
Larry Stelmack	An Introduction to Ion Beam Coating Deposition Techniques
Ron Synowicki	Introduction to Spectroscopic Ellipsometry
Viacheslav V. Zhurin	Industrial Ion Processing