AVS e-Talk: Enabling Scalable Superconducting Quantum Devices with 300 mm Wafer Processes
- Location:
Virtual/Online
- Contact:
- Web:
- https://avs.swoogo.com/avsetalks2026
This talk will describe how NY Creates is working to establish a 300-mm “quantum foundry” that democratizes access to high performance, repeatable devices. The foundry incorporates a long series of processes tailored to quantum-device requirements. The presentation highlights R&D on superconducting materials stacks based on Ta, Nb, and Al, along with their oxides and nitrides. Challenges in reformulating conventional processes for quantum technologies will be discussed. Representative examples illustrate how advanced 300-mm tool capabilities, in-situ monitoring, and wafer-scale metrology are used to control thin-film properties and correlate materials metrics to device-relevant outcomes. The talk concludes with our perspectives on how a Superconducting Quantum Process Design Kit (SQPDK) can accelerate advances by partners across academia, national labs, and industry.